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PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing [Paperback] Review
GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is but one in the longest running continuing series in thin film science, composed of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order being capable to reflect the introduction of today's science also to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses probably the most important facets of both inorganic and organic thin films, in their theoretical as well as technological aspects. Therefore, in order to reflect the current technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUME This volume, part of the Thin Films Series, continues to be wholly written by two authors instead of showcasing several edited manuscripts.
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